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Dr. Zuhal Tasdemir
Dr. Zuhal Tasdemir
Marie Curie Postdoctoral Fellow
Verified email at psi.ch
Title
Cited by
Cited by
Year
Integrated humidity sensor based on SU-8 polymer microdisk microresonator
M Eryürek, Z Tasdemir, Y Karadag, S Anand, N Kilinc, BE Alaca, A Kiraz
Sensors and Actuators B: Chemical 242, 1115-1120, 2017
912017
Progress in EUV resists towards high-NA EUV lithography
X Wang, Z Tasdemir, I Mochi, M Vockenhuber, L van Lent-Protasova, ...
Extreme Ultraviolet (EUV) Lithography X 10957, 19-27, 2019
342019
A deep etching mechanism for trench-bridging silicon nanowires
Z Tasdemir, N Wollschläger, W Österle, Y Leblebici, BE Alaca
Nanotechnology 27 (9), 095303, 2016
252016
Evaluation of EUV resists for 5nm technology node and beyond
Z Tasdemir, X Wang, I Mochi, L van Lent-Protasova, M Meeuwissen, ...
International conference on extreme ultraviolet lithography 2018 10809, 85-94, 2018
212018
State-of-the-art EUV materials and processes for the 7nm node and beyond
E Buitrago, M Meeuwissen, O Yildirim, R Custers, R Hoefnagels, ...
Extreme Ultraviolet (EUV) Lithography VIII 10143, 170-177, 2017
212017
Effect of native oxide on stress in silicon nanowires: Implications for nanoelectromechanical systems
M Nasr Esfahani, S Zare Pakzad, T Li, XF Li, Z Tasdemir, ...
ACS Applied Nano Materials 5 (9), 13276-13285, 2022
142022
A new characterization approach to study the mechanical behavior of silicon nanowires
S Zare Pakzad, M Nasr Esfahani, Z Tasdemir, N Wollschlaeger, XF Li, T Li, ...
Mrs Advances 6, 500-505, 2021
132021
Top-down technique for scaling to nano in silicon MEMS
M Yilmaz, Y Kilinc, G Nadar, Z Tasdemir, N Wollschläger, W Oesterle, ...
Journal of Vacuum Science & Technology B 35 (2), 2017
132017
Nanomechanical modeling of the bending response of silicon nanowires
S Zare Pakzad, M Nasr Esfahani, Z Tasdemir, N Wollschläger, T Li, ...
ACS Applied Nano Materials 6 (17), 15465-15478, 2023
112023
Real-and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (∊ 044) and tilt of suspended monolithic silicon nanowire structures
S Dolabella, R Frison, GA Chahine, C Richter, TU Schulli, Z Tasdemir, ...
Journal of applied crystallography 53 (1), 58-68, 2020
112020
Chemically amplified EUV resists approaching 11nm half-pitch
Z Tasdemir, M Vockenhuber, I Mochi, KG Olvera, M Meeuwissen, ...
Extreme Ultraviolet (EUV) Lithography IX 10583, 451-457, 2018
112018
Determination of the elastic behavior of silicon nanowires within a scanning electron microscope
N Wollschläger, Z Tasdemir, I Häusler, Y Leblebici, W Österle, BE Alaca
Journal of Nanomaterials 2016 (1), 4905838, 2016
112016
Monolithic Fabrication of Silicon Nanowires Bridging Thick Silicon Structures
Z Tasdemir, O Peric, D Sacchetto, GE Fantner, Y Leblebici, BE Alaca
IEEE Nanotechnology Express 1 (1), 2-5, 2015
112015
Studying resist performance for contact holes printing using EUV interference lithography
X Wang, LT Tseng, D Kazazis, Z Tasdemir, M Vockenhuber, I Mochi, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 18 (1), 013501-013501, 2019
102019
Monolithic fabrication of silicon nanowires bridging thick silicon structures
Z Tasdemir, O Peric, D Sacchetto, GE Fantner, Y Leblebici, BE Alaca
IEEE Transactions on Nanotechnology 17 (6), 1299-1302, 2018
102018
Contrast matching of line gratings obtained with NXE3XXX and EUV-interference lithography
Z Tasdemir, I Mochi, KG Olvera, M Meeuwissen, O Yildirim, R Custers, ...
International Conference on Extreme Ultraviolet Lithography 2017 10450, 280-289, 2017
52017
Pushing the Limits of Nanopatterning via Extreme Ultraviolet Lithography
Z Tasdemir
EMPA, Sep 21, 2018
22018
Flexible Ceramic Polymer Composite Substrates With Spatially Variable Dielectrics for Miniaturized RF Applications
Z Tasdemir, G Kiziltas
Symposium on Novel Materials and Devices for Spintronics 1183, 145-150, 2010
22010
Photomask
X Wang, LT Tseng, D Kazazis, Z Tasdemir, M Vockenhuber, I Mochi, ...
2019
Interface Engineering with Self‐Assembled Monolayers in Biosensors
C Taşaltín, İ Gürol, H Duran, Y Uludağ, UA Sezer, Z Taşdemir, F Başarír
Hybrid Organic‐Inorganic Interfaces: Towards Advanced Functional Materials …, 2018
2018
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Articles 1–20