| Finite element analysis of PMMA pattern formation during hot embossing process CM Kiew, WJ Lin, TJ Teo, JL Tan, W Lin, G Yang 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics …, 2009 | 28 | 2009 |
| Optimal feed-forward control for multizone baking in microlithography WK Ho, A Tay, M Chen, CM Kiew Industrial & engineering chemistry research 46 (11), 3623-3628, 2007 | 13 | 2007 |
| Model-based compensation of thermal disturbance in a precision linear electromagnetic actuator J Hey, CM Kiew, G Yang, R Martinez-Botas IEEE/ASME Transactions on Mechatronics 19 (5), 1477-1488, 2013 | 12 | 2013 |
| A finite-difference thermal model of a three-phase coreless linear motor as a heat source JH Chow, ZW Zhong, W Lin, LP Khoo, CM Kiew Applied Thermal Engineering 87, 605-614, 2015 | 10 | 2015 |
| Model-based control of a high-precision imprinting actuator for micro-channel fabrications TJ Teo, IM Chen, CM Kiew, G Yang, W Lin 2010 IEEE international conference on robotics and automation, 3159-3164, 2010 | 10 | 2010 |
| A flexure-based planar parallel nanopositioner with partially decoupled kinematic architecture G Yang, W Lin, T Teo, C Kiew, HL Ho EUSPEN International Conference,(Zurich, Switzerland), 2751-2756, 2009 | 9 | 2009 |
| Robust forecasts and run-to-run control for processes with linear drifts JH Lee, CM Kiew Journal of Process Control 19 (4), 636-643, 2009 | 7 | 2009 |
| In Situ Measurement & Control of Photoresist Develpment in Microlithorgraphy CM Kiew, A Tay, WK Ho, KW Lim, Y Zhou 2005 IEEE Instrumentationand Measurement Technology Conference Proceedings 2 …, 2005 | 6 | 2005 |
| Energy benchmark of polymeric embossing systems namely hot embossing systems and ultrasonic systems JL Tan, CM Kiew, YC Lam 2014 13th International Conference on Control Automation Robotics & Vision …, 2014 | 2 | 2014 |
| ‘Taming” Ultrasonic vibration with ILC for controlled pre-heating of polymeric embossing process JL Tan, CM Kiew, P Khuntontong, G Yang, YC Lam Euspen 1, 324-328, 2012 | 2 | 2012 |
| Hot-Embossing of Microstructures on Large Area of Polymers W Lin, WJ Chen, CM Kiew, CL Ng, H Luo, CS Teo, GL Yang Key Engineering Materials 447, 483-487, 2010 | 2 | 2010 |
| Real-time spatial control of photoresist development rate A Tay, WK Ho, N Hu, CM Kiew, KY Tsai Metrology, Inspection, and Process Control for Microlithography XXI 6518 …, 2007 | 2 | 2007 |
| Robust real-time thin film thickness estimation CM Kiew, A Tay, WK Ho, KW Lim, JH Lee The 17th Annual SEMI/IEEE ASMC 2006 Conference, 57-62, 2006 | 2 | 2006 |
| Real-time control of photoresist development process A Tay, WK Ho, CM Kiew, Y Zhou, JH Lee Data Analysis and Modeling for Process Control II 5755, 244-250, 2005 | 1 | 2005 |
| In-situ Measurement and Control for Photoresist Processing in Microlithography A Tay, WK Ho, X Wu, CM Kiew American Institute of Chemical Engineers, 2004 | | 2004 |
| Multiphysics design optimization of a high precision Flexural-based Electromagnetic Actuator (FELA) for improved precision and efficiency J Hey, CM Kiew, TJ Teo, W Lin, G Yang | | |
