| Step and flash imprint lithography: a new approach to high-resolution patterning M Colburn, SC Johnson, MD Stewart, S Damle, TC Bailey, B Choi, ... Emerging Lithographic Technologies III 3676, 379-389, 1999 | 1060 | 1999 |
| Step and flash imprint lithography: Template surface treatment and defect analysis T Bailey, BJ Choi, M Colburn, M Meissl, S Shaya, JG Ekerdt, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 513 | 2000 |
| Template for room temperature, low pressure micro-and nano-imprint lithography T Bailey, BJ Choi, M Colburn, SV Sreenivasan, CG Willson, J Ekerdt US Patent 6,696,220, 2004 | 422 | 2004 |
| Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography P Ruchhoeft, M Colburn, B Choi, H Nounu, S Johnson, T Bailey, S Damle, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1999 | 212 | 1999 |
| Imprint lithography for integrated circuit fabrication DJ Resnick, WJ Dauksher, D Mancini, KJ Nordquist, TC Bailey, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003 | 182 | 2003 |
| Development and advantages of step-and-flash lithography M Colburn, T Bailey, BJ Choi, JG Ekerdt, SV Sreenivasan, CG Willson Solid State Technology 44 (7), 67-80, 2001 | 170 | 2001 |
| Step and flash imprint lithography for sub-100-nm patterning M Colburn, A Grot, MN Amistoso, BJ Choi, TC Bailey, JG Ekerdt, ... Emerging Lithographic Technologies IV 3997, 453-457, 2000 | 170 | 2000 |
| High-resolution overlay alignment methods for imprint lithography SV Sreenivasan, BJ Choi, M Colburn, T Bailey US Patent 6,921,615, 2005 | 160 | 2005 |
| Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography BJ Choi, M Colburn, SV Sreenivasan, CG Willson, T Bailey, J Ekerdt US Patent 6,954,275, 2005 | 154 | 2005 |
| High resolution templates for step and flash imprint lithography DJ Resnick, WJ Dauksher, DP Mancini, KJ Nordquist, ES Ainley, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 1 (3), 284-289, 2002 | 143 | 2002 |
| Method and system of automatic fluid dispensing for imprint lithography processes B Choi, S Sreenivasan, C Willson, M Colburn, T Bailey, J Ekerdt US Patent App. 09/908,455, 2002 | 127 | 2002 |
| Method of varying template dimensions to achieve alignment during imprint lithography SV Sreenivasan, BJ Choi, M Colburn, T Bailey US Patent 6,916,585, 2005 | 121 | 2005 |
| Characterization and modeling of volumetric and mechanical properties for step and flash imprint lithography photopolymers M Colburn, I Suez, BJ Choi, M Meissl, T Bailey, SV Sreenivasan, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2001 | 107 | 2001 |
| Imprint lithography template comprising alignment marks SV Sreenivasan, BJ Choi, M Colburn, T Bailey US Patent 6,842,229, 2005 | 101 | 2005 |
| Template fabrication schemes for step and flash imprint lithography TC Bailey, DJ Resnick, D Mancini, KJ Nordquist, WJ Dauksher, E Ainley, ... Microelectronic engineering 61, 461-467, 2002 | 98 | 2002 |
| Patterning nonflat substrates with a low pressure, room temperature, imprint lithography process M Colburn, A Grot, BJ Choi, M Amistoso, T Bailey, SV Sreenivasan, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2001 | 88 | 2001 |
| Imprint lithography template having a feature size under 250 nm TC Bailey, BJ Choi, ME Colburn, SV Sreenivasan, CG Willson, JG Ekerdt US Patent 7,229,273, 2007 | 87 | 2007 |
| Imprint lithography templates having alignment marks T Bailey, S Johnson, M Colburn, BJ Choi, B Smith, J Ekerdt, C Willson, ... US Patent App. 10/666,527, 2005 | 84 | 2005 |
| Step and flash imprint lithography: Defect analysis T Bailey, B Smith, BJ Choi, M Colburn, M Meissl, SV Sreenivasan, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2001 | 81 | 2001 |
| Hydrogen silsesquioxane for direct electron-beam patterning of step and flash imprint lithography templates DP Mancini, KA Gehoski, E Ainley, KJ Nordquist, DJ Resnick, TC Bailey, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2002 | 79 | 2002 |
