Microstructure factor and mechanical and electronic properties of hydrogenated amorphous and nanocrystalline silicon thin-films for microelectromechanical systems applications J Mouro, A Gualdino, V Chu, JP Conde Journal of Applied Physics 114 (18), 2013 | 22 | 2013 |
Mechanical and piezoresistive properties of thin silicon films deposited by plasma-enhanced chemical vapor deposition and hot-wire chemical vapor deposition at low substrate … J Gaspar, A Gualdino, B Lemke, O Paul, V Chu, JP Conde Journal of Applied Physics 112 (2), 2012 | 21 | 2012 |
Study of the out-of-plane vibrational modes in thin-film amorphous silicon micromechanical disk resonators A Gualdino, V Chu, JP Conde Journal of Applied Physics 113 (17), 2013 | 14 | 2013 |
Tunable properties of hydrogenated amorphous/nanocrystalline silicon thin-films for enhanced MEMS resonators performance J Mouro, A Gualdino, V Chu, JP Conde Journal of microelectromechanical systems 23 (3), 600-609, 2013 | 12 | 2013 |
Pressure effects on the dynamic properties of hydrogenated amorphous silicon disk resonators A Gualdino, V Chu, JP Conde Journal of Micromechanics and Microengineering 22 (8), 085026, 2012 | 10 | 2012 |
A System Based on Capacitive Interfacing of CMOS With Post-Processed Thin-Film MEMS Resonators Employing Synchronous Readout for Parasitic Nulling L Huang, W Rieutort-Louis, A Gualdino, L Teagno, Y Hu, J Mouro, ... IEEE Journal of Solid-State Circuits 50 (4), 1002-1015, 2015 | 7 | 2015 |
Electrical characterization of thin-film silicon flexural resonators in linear and nonlinear regimes of motion for integration with electronics J Mouro, L Teagno, A Gualdino, V Chu, JP Conde Sensors and Actuators A: Physical 247, 482-493, 2016 | 6 | 2016 |
Sub-micron gap in-plane micromechanical resonators based on low-temperature amorphous silicon thin-films on glass substrates A Gualdino, J Gaspar, V Chu, JP Conde Journal of Micromechanics and Microengineering 25 (7), 075026, 2015 | 6 | 2015 |
Multi-modal analysis of out-of-plane vibration modes of thin-film circular resonators for mass sensing applications A Gualdino, V Chu, JP Conde Procedia Engineering 47, 1121-1124, 2012 | 5 | 2012 |
Low cost UV patternable organic-inorganic Sol-Gel Siloxanepoly (Oxyethylene) materials for integrated optics PS André, R Nogueira, RAS Ferreira, A Gualdino, LD Carlos, NJO Silva, ... 2006 International Conference on Transparent Optical Networks 1, 223-226, 2006 | 5 | 2006 |
An asic for readout of post-processed thin-film mems resonators by employing capacitive interfacing and active parasitic cancellation L Huang, W Rieutort-Louis, A Gualdino, L Teagno, Y Hu, J Mouro, ... 2014 Symposium on VLSI Circuits Digest of Technical Papers, 1-2, 2014 | 2 | 2014 |
Thin film amorphous silicon bulk-mode disk resonators fabricated on glass substrates A Gualdino, V Chu, JP Conde MRS Online Proceedings Library 1299, 1-6, 2011 | 2 | 2011 |
Optical Doppler coherence tomography based on a field-programmable gate array HE Larsen, RT Nilsson, L Thrane, DK Kristensen, F Pedersen, ... Coherence Domain Optical Methods and Optical Coherence Tomography in …, 2005 | 2 | 2005 |
Sub-micron gap a-Si: H thin film Lamé-mode resonator processed at low temperature on a glass substrate A Gualdino, J Gaspar, V Chu, JP Conde 2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013 | 1 | 2013 |
Low temperature sub-micron gap thin-film silicon resonators on glass substrate J Mouro, A Gualdino, L Teagno, V Chu, JP Conde Procedia Engineering 87, 1418-1421, 2014 | | 2014 |
Hydrogenated Amorphous Silicon Thin-Film Disk Resonators A Gualdino, V Chu, JP Conde Procedia Engineering 25, 1525-1528, 2011 | | 2011 |